Previous-generation vertical processors for 150–200mm wafers
These previous versions of the AVP Ace are vertical batch furnaces with a flexible platform for diffusion, oxidation and LPCVD processes. Available with single or dual boat configuration and batches up to 200 wafers. New AVP-8200 and RVP-9200 are available brand new and refurbished (subject to donor availability). Refurbished AVP-8000 and RVP-9000 are available subject to donor availability.